Publisher's Synopsis
Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.
Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification and Synthesis
Hardback (05 Sep 2000)
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Book information
| ISBN: | 9780815511991 |
| Publisher: | Elsevier Science |
| Imprint: | William Andrew |
| Pub date: | 05 Sep 2000 |
| DEWEY: | 621.3817 |
| DEWEY edition: | 19 |
| Language: | English |
| Number of pages: | 438 |
| Weight: | 710g |
| Height: | 234mm |
| Width: | 156mm |
| Spine width: | 25mm |
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