Book (31 May 2004)
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The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
| ISBN: | 9781580535366 |
| Publisher: | Artech House |
| Imprint: | Artech House |
| Pub date: | 31 May 2004 |
| DEWEY: | 681.2 |
| DEWEY edition: | 22 |
| Language: | English |
| Number of pages: | 269 |
| Weight: | 706g |
| Height: | 256mm |
| Width: | 184mm |
| Spine width: | 23mm |
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Published 01 Oct 1996
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