Measurement Technology for Micro-Nanometer Devices

Measurement Technology for Micro-Nanometer Devices

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Publisher's Synopsis

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale - Highlights the advanced research work from industry and academia in micro-nano devices test technology - Written at both introductory and advanced levels, provides the fundamentals and theories - Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Book information

ISBN: 9781548115760
Publisher: Createspace Independent Publishing Platform
Imprint: Createspace Independent Publishing Platform
Weight: -1g