Physical and Technical Problems of SOI Structures and Devices

Physical and Technical Problems of SOI Structures and Devices - NATO ASI Series.

Hardback (30 Jun 1995)

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Publisher's Synopsis

In Physical and Technical Problems of SOI Structures and Devices, specialists in silicon-on-insulator technology from both East and West meet for the first time, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterisation, device and circuit issues.

Book information

ISBN: 9780792336006
Publisher: Kluwer Academic in association with NATO Scientific Affairs Division
Imprint: Springer
Pub date:
DEWEY: 621.38152
DEWEY edition: 20
Language: English
Number of pages: 290
Weight: 646g
Height: 230mm
Width: 171mm
Spine width: 25mm