Stimulated Deposition Processes and Materials Aspects of Ion Beam Synthesis Proceedings of Symposium C on Ion Beam, Plasma, Laser, and Thermally-Stimulated Deposition Processes and Symposium G on Materials Aspects of Ion Beam Synthesis: Phase Formation and Modification of the 1993 E-MRS Spring Conference, Strasbourg, France, May 4-7, 1993

This volume contains the proceedings of Symposium C: Ion Beam, Plasma, Laser, and Thermally-Stimulated Deposition Processes and Symposium G: Material Aspects of Ion Beam Synthesis: Phase Formation and Modification of the E-MRS 1993 Spring conference. Symposium C covers recent trends in the field of deposition processes stimulated by low energy particle beams and shows the wide range of materials which can be modified advantageously by energetic ion and photon bombardment.;Topics covered include: sputter-deposition processes; low energy ion-assisted deposition processes and thermally-activitated CVD processes; ion beam-assisted deposition and laser beam-induced modifications of materials. Symposium G brought together scientists and engineers working in similar fields to stimulate further investigations not only of SIN40X but of other materials systems and applications. The topics covered include: recent developments in the science and technology of silicide formation; mechanisms responsible for secondary defect formation in SIMOX materials; the formation and role of synthesised "altered" layers during surface analysis.